EIPBN
The EIPBN
Conference is recognized as the foremost international meeting
dedicated to lithographic science and technology and its application to
micro and nanofabrication techniques. The conference brings together
engineers and scientists from industries and universities from all over
the world to discuss recent progress and future trends.
We are pleased to feature the following paper on the history of the EIPBN conference:
Another item of historical interest is Richard Feynman's 1959 lecture
Meeting
Format
The conference
opens on Tuesday afternoon with a special commercial session which
features vendors of materials and equipment relevant to this
conference. The plenary session is on Wednesday morning. The rest of
the conference has two parallel sessions. The length of presentation is
30 minutes for invited papers and 20 minutes for contributed papers,
discussion time included. A special feature of the technical program is
the poster session that includes invited and contributed papers. There
is only one poster session, but posters will be displayed for informal
viewing throughout the entire conference. No distinction is made
between the importance of poster and oral presentations.
Technical
Scope
Abstracts
representing high quality original research are invited in the
following areas:
DUV, immersion, EUV and X-ray lithography
Electron and ion beam lithography
Sub-half wavelength "super resolution" optical
lithography
Photon- and charged-particle optics
Metrology and alignment
Resists and resist processing
Plasma etching and deposition
Nanofabrication techniques
Topics
in nanofabrication and emerging technologies include:
Simulation and computer aided design for the
Nanoscale Era
Molecular nanoelectronics
Bio-nanotechnology & hybrid bio/solid
state devices
Micro and nanoscaled MEMS
Nanoimprint lithography and embossing
Atom and molecule manipulation
Conference Chair
J. Alexander Liddle
EIPBN 2007
c/o Widerkehr and Associates
Suite 312
16220 South Frederick Av
Gaithersburg MD 20877
jalEIPBN2007@comcast.net
Program Chair
Gregory Wallraff
IBM Almaden Research Center
San Jose CA 95120
Phone: 408 927 2503
Fax: 408 927 3310
gmwall@almaden.ibm.com
Meeting arrangements
Meeting
arrangements by JEM Meetings, who have arranged the EIPBN meetings
since 1995. Call JEM at 914-659-6144 or jemmtgs@optonline.net
for all your conferencing needs.
Shipping
Please refer to our "travel" page for shipping instructions.
Related Conferences
Conferences
of similar interest are held in the Fall in Europe (MNE) and in Japan
(MNC). Check out our "sister conferences" with these links:
MNE 2007
International
Microprocess and Nanotechnology Conference, Japan
Gordon
Research Conferences
Student
Support
Limited funds are
available to support student travel. The
Conference Chair must receive a
request for support from the student's advisor by May 1.
Decisions about student support will be returned by May 15.
Students receiving support must submit a manuscript, and
preference will be given to students who are both first
author and presenter. (At EIPBN there is no distinction
between oral and poster presentations.)
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